The Effect of Corrugations on Mechanical Sensitivity of Diaphragm for MEMS Capacitive Microphone
نویسندگان
چکیده مقاله:
In this paper the effect of corrugated diaphragm on performance of MEMS microphone is described. The corrugated diaphragm is modeled in order to improve the sensitivity of micromachined silicon acoustic sensor. Analytical analyzes have been carried out to derive mathematic expressions for the mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that the mechanical sensitivity and displacement of diaphragm can be modeled using thin plate theory. The mechanical stress of corrugated diaphragm is calculated using mathematical model and its relationship to residual stress is expressed. The analytically result show that the mechanical sensitivity of diaphragm can be increased using corrugation. Because the corrugation can be reduce the effect of residual stress of diaphragm.
منابع مشابه
Accurate Determination of the Pull-in Voltage for MEMS Capacitive Microphone with Clamped Square Diaphragm
Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...
متن کاملFabrication and Characterization of a New MEMS Capacitive Microphone using Perforated Diaphragm
In this paper, a novel single-chip MEMS capacitive microphone is presented. The novelties of this method relies on the moveable aluminum (Al) diaphragm positioned over the backplate electrode, where the diaphragm includes a plurality of holes to allow the air in the gap between the electrode and diaphragm to escape and thus reduce acoustical damping in the microphone. Spin-on-glass (SOG) was us...
متن کاملFabrication of a Novel MEMS Capacitive Microphone using Lateral Slotted Diaphragm
external amplifier was able to detect the sound waves from microphone on speaker and oscilloscope. The maximum amplitude of output speech signal of amplifier is 45 mV, and the maximum output of MEMS microphone is 1.125 µV.
متن کامل“the effect of risk aversion on the demand for life insurance: the case of iranian life insurance market”
abstract: about 60% of total premium of insurance industry is pertained?to life policies in the world; while the life insurance total premium in iran is less than 6% of total premium in insurance industry in 2008 (sigma, no 3/2009). among the reasons that discourage the life insurance industry is the problem of adverse selection. adverse selection theory describes a situation where the inf...
15 صفحه اولA MEMS Capacitive Microphone Modelling for Integrated Circuits
In this paper, a model for MEMS capacitive microphone is presented for integrated circuits. The microphone has a diaphragm thickness of 1 μm, 0.5 × 0.5 mm2 dimension, and an air gap of 1.0 μm. Using the analytical and simulation results, the important features of MEMS capacitive microphone such as pull-in voltage and sensitivity are obtained 3.8v and 6.916 mV/Pa, respectively while there is no...
متن کاملthe effect of taftan pozzolan on the compressive strength of concrete in the environmental conditions of oman sea (chabahar port)
cement is an essential ingredient in the concrete buildings. for production of cement considerable amount of fossil fuel and electrical energy is consumed. on the other hand for generating one tone of portland cement, nearly one ton of carbon dioxide is released. it shows that 7 percent of the total released carbon dioxide in the world relates to the cement industry. considering ecological issu...
منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ذخیره در منابع من قبلا به منابع من ذحیره شده{@ msg_add @}
عنوان ژورنال
دوره 26 شماره 11
صفحات 1323- 1330
تاریخ انتشار 2013-11-01
با دنبال کردن یک ژورنال هنگامی که شماره جدید این ژورنال منتشر می شود به شما از طریق ایمیل اطلاع داده می شود.
میزبانی شده توسط پلتفرم ابری doprax.com
copyright © 2015-2023